Prof. Jun Matsui
at Yamagata Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 March 2020 Presentation
Proceedings Volume 11277, 1127709 (2020) https://doi.org/10.1117/12.2539550
KEYWORDS: Polymer thin films, Polymers, Annealing, Silicon films, Humidity, Polymerization, Thin films, Silicon, X-rays, Scattering

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