Solid immersion lens (SIL) is used in microscopic systems for hyper numerical aperture (NA) imaging. The NA of the
SIL microscope can be larger than 2 by using the high refractive index SIL. In this paper, examples of hyper-NA
(NA>1.4) imaging are illustrated, including a normal SIL microscope for imaging samples like CPU chips, photomasks
which have no cover layer and a special SIL microscope for imaging samples like Blu-Ray optical discs which have
cover layer to protect the pattern. In both cases, good contrast images can be achieved by minimizing the system aberration. At the end, characteristics of induced polarization imaging (imaging through crossed polarizers) and a twostep solid immersion lens using Gallium Phosphide (GaP) (NA~2) are discussed.
A solid immersion lens (SIL) is described with NA = 2.64 that is fabricated
from a two-step process using a large BK7 glass hemisphere and a small GaP hemisphere.
The Gallium Phosphide (GaP) hemisphere has a radius 114μm, and is cemented in the
center of BK7 SIL with index-matching epoxy. The BK7 SIL thickness is accommodated
to have both BK7 SIL and GaP SIL in an image centric configuration. The two-step GaP
SIL is tested on an induced polarization imaging system. Induced polarization pupil
images, the native polarization image and induced polarization image of a DVD RW
sample are given in this paper.
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