Jung-Chul Park
Senior MTS
SPIE Involvement:
Publications (15)

Proceedings Article | 27 September 2013 Paper
Proc. SPIE. 8829, Organic Light Emitting Materials and Devices XVII
KEYWORDS: Organic light emitting diodes, Ultraviolet radiation, Interfaces, Control systems, Electroluminescence, Laser induced fluorescence, Diodes, Aluminum, Excitons, Absorption

Proceedings Article | 23 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Metrology, Cadmium, Error analysis, Reflectivity, Scatterometry, Double patterning technology, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Diffraction gratings

Proceedings Article | 26 March 2007 Paper
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Lithographic illumination, Metals, Printing, Photomasks, Optical proximity correction, SRAF, Photoresist processing, Resolution enhancement technologies, Fiber optic illuminators

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Optical lithography, Etching, Manufacturing, Printing, Photomasks, Double patterning technology, Optical proximity correction, Critical dimension metrology, Photoresist processing, Model-based design

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Lithography, Diffraction, Optical lithography, Metals, Manufacturing, Printing, Photomasks, Optical proximity correction, Nanoimprint lithography, Resolution enhancement technologies

Showing 5 of 15 publications
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