Dr. Jung-Jin Kim Profile

Dr. Jung-Jin Kim

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 23 November 2024 Presentation + Paper

Development of laser-assisted CD correction system in EUV masks

JongKeun Oh, Geonhui Park, YongWoo Kim, JongJu Park, JungJin Kim, SangHee Lee, Hyun Yoon, Seryeyohan Cho, KiHoon Choi

Proceedings Volume 13216, 132161Y (2024) https://doi.org/10.1117/12.3034358

KEYWORDS: Critical dimension metrology, Laser development, Extreme ultraviolet, Photomasks, Deep ultraviolet, Quality management, Quality control, Wet etching, Transmittance, Reflection

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Proceedings Article | 20 May 2016 Paper

Formation mechanism of the photomask blanks material related haze

Jung-Jin Kim, Junyoul Choi, Soowan Koh, Minho Kim, Jiyoung Lee, Han-Shin Lee, Byung Gook Kim, Chan-uk Jeon

Proceedings Volume 9984, 99840W (2016) https://doi.org/10.1117/12.2246678

KEYWORDS: Air contamination, Photomasks, Molybdenum, Ions, Transmission electron microscopy, Silicon, Critical dimension metrology, Wet etching, Scanners, Pellicles

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