Dr. Jung-Jin Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 May 2016 Paper
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Air contamination, Scanners, Ions, Silicon, Transmission electron microscopy, Pellicles, Photomasks, Wet etching, Critical dimension metrology, Molybdenum

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