Dr. Jürgen Keller
Doctor at AMIC GmbH
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 30 April 2007 Paper
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Microelectromechanical systems, Nanotechnology, Mechanics, Reliability, Atomic force microscopy, Scanning electron microscopy, Ion beams, Digital image correlation, Scanning probe microscopy, Photomicroscopy

Proceedings Article | 28 April 2006 Paper
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Microelectromechanical systems, Semiconductors, Microsystems, Sensors, Ions, Silicon, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

Proceedings Article | 4 April 2006 Paper
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Microsystems, Sensors, Ions, Silicon, Manufacturing, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

Proceedings Article | 4 April 2006 Paper
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Polymers, Interfaces, Reliability, Atomic force microscopy, Finite element methods, Microelectronics, Digital image correlation, Scanning probe microscopy, Chemical elements

Proceedings Article | 16 March 2006 Paper
Proc. SPIE. 6179, Advanced Sensor Technologies for Nondestructive Evaluation and Structural Health Monitoring II
KEYWORDS: Microelectromechanical systems, Gas sensors, Sensors, Ions, Reliability, Atomic force microscopy, Scanning electron microscopy, Ion beams, Digital image correlation, Scanning probe microscopy

Showing 5 of 14 publications
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