Dr. K. Subramanya Mayya Profile

Dr. K. Subramanya Mayya

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 20 March 2010 Paper

Patterning with EUVL: the road to 22nm node

Hyun-Woo Kim, Hai-Sub Na, Kyoung-Yong Cho, Chang-Min Park, Takahiro Yasue, Subramanya Mayya, Han-Ku Cho

Proceedings Volume 7636, 76360Q (2010) https://doi.org/10.1117/12.846474

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Line width roughness, Lithography, Deep ultraviolet, Polymers, Chemical reactions, Double patterning technology, Opacity, Photomasks

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Proceedings Article | 11 December 2009 Paper

EUV sensitive photo-acid generator sans chromophore

K. Subramanya Mayya, Yool Kang, Takahiro Yasue, Seok-Hwan Oh, Seong-Woon Choi, Chan-Hoon Park

Proceedings Volume 7520, 75200R (2009) https://doi.org/10.1117/12.837341

KEYWORDS: Extreme ultraviolet lithography, Chromophores, Extreme ultraviolet, Lithography, Optical lithography, Optical transfer functions, Scanning electron microscopy, Electrons, Switches, Polymers

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Proceedings Article | 4 May 2005 Paper

In-line chemical shrink process for 70 nm contact hole patterns by the room-temperature electrostatic self-assembly

Jung Hwan Hah, Subramanya Mayya, Mitsuhiro Hata, Hyun-Woo Kim, Man-Hyoung Ryoo, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon, Byung-Il Ryu

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599450

KEYWORDS: Optical lithography, Lithography, Photoresist processing, Chemical reactions, Resolution enhancement technologies, Hydrogen, Scanning electron microscopy, Polymers, Interfaces, Semiconductor manufacturing

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