Dr. Kaan Demirel Profile

Dr. Kaan Demirel

at Middle East Technical Univ

SPIE Involvement:

Author

Publications (1)

SPIE Journal Paper | 21 September 2015

Kaan Demirel, Erdem Yazgan, Şimşek Demir, Tayfun Akın

JM3, Vol. 14, Issue 03, 035005, (September 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.035005

KEYWORDS: Microelectromechanical systems, Switches, Gold, Etching, Amorphous silicon, Silicon, Dielectrics, Electroplating, Semiconducting wafers

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Keywords/Phrases