Mr. Kagehiro Kageyama Profile

Kagehiro Kageyama

at ULVAC Coating Corp

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 26 September 2019 Presentation + Paper

Narihiro Morosawa, Eiji Shiozaki, Kagehiro Kageyama

Proceedings Volume 11148, 1114817 (2019) https://doi.org/10.1117/12.2536624

KEYWORDS: Chromium, Reflection, Reflectivity, Refractive index, Etching, Phase shifts, Flat panel displays

Proceedings Article | 3 October 2018 Paper

Narihiro Morosawa, Yasunori Noguchi, Satoru Mochizuki, Kagehiro Kageyama

Proceedings Volume 10810, 108101J (2018) https://doi.org/10.1117/12.2501511

KEYWORDS: Chromium, Transmittance, Etching, Glasses, Flat panel displays, Wet etching

Proceedings Article | 13 July 2017 Paper

Noriyuki Harashima, Tatsuya Isozaki, Arata Kawanishi, Shuichiro Kanai, Kagehiro Kageyama, Hiroyuki Iso, Tatsuya Chishima

Proceedings Volume 10454, 104540S (2017) https://doi.org/10.1117/12.2282803

KEYWORDS: Photomasks, Chromium, Coating, Binary data, Quartz, Polishing, Lithography, Semiconducting wafers, Absorbance, Phase shifts

Proceedings Article | 23 October 2015 Paper

Kagehiro Kageyama, Satoru Mochizuki, Hiroyuki Yamakawa, Shigeru Uchida

Proceedings Volume 9635, 96351I (2015) https://doi.org/10.1117/12.2196857

KEYWORDS: Flat panel displays, Photomasks, Binary data, Phase shifts, Chromium, Transmittance, Coating, Wet etching, Etching, Optical lithography

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Keywords/Phrases