Mr. Kaiki Ito Profile

Kaiki Ito

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 16 October 2017 Presentation + Paper

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 10451, 104510G (2017) https://doi.org/10.1117/12.2284735

KEYWORDS: Reticles, Lithography, Etching, Wet etching, Optical lithography, Printing, Lamps, Cylindrical lenses, 3D scanning, Photomasks

Proceedings Article | 13 July 2017 Paper

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 10454, 1045410 (2017) https://doi.org/10.1117/12.2277818

KEYWORDS: Lithography, Wet etching, Optical lithography, Printing

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Keywords/Phrases