Kanstantsin Shchehlik
at Mentor, a Siemens Business
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 April 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Coastal modeling, Cadmium, Data modeling, Calibration, Neural networks, Machine learning, Optical proximity correction, Systems modeling, Process modeling

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