Karin Prater
at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 27 April 2016 Paper
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Fabrication, Carbon, Lithography, Electron beam lithography, Diffraction, Beam splitters, Diffractive optical elements, Silica, Etching, Glasses, Silicon, Scanning electron microscopy, Micro optics, Optical resolution, Photomasks, Integrated optics, Reactive ion etching, Precision glass molding

Proceedings Article | 24 September 2015 Paper
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Carbon, Beam splitters, Diffractive optical elements, Etching, Glasses, Silicon, Optical fabrication, Reactive ion etching, Semiconducting wafers, Precision glass molding

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Carbon, Titanium, Diffractive optical elements, Silica, Etching, Glasses, Photomasks, Reactive ion etching, Power meters, Precision glass molding

Proceedings Article | 25 September 2014 Paper
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Carbon, Titanium, Diffractive optical elements, Silica, Etching, Glasses, Photomasks, Reactive ion etching, Precision glass molding, Glass molding

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Carbon, Titanium, Optical lithography, Etching, Glasses, Photoresist materials, Photomasks, Aluminum, Reactive ion etching, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top