Katherina Babich
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 30 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Diffractive optical elements, Silicon, Diffusion, Manufacturing, Monte Carlo methods, Shape analysis, Design for manufacturability

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Silicon films, Reactive ion etching

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Oxides, Etching, Polymers, Chemistry, Atomic force microscopy, Scanning electron microscopy, Plasma etching, Line edge roughness, Photoresist processing, Plasma

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Electron beam lithography, Etching, Interfaces, Silicon, Reflectivity, Image resolution, Plasma enhanced chemical vapor deposition, Photoresist processing, Plasma

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Oxides, Lithography, Etching, Polymers, Silicon, Reflectivity, Silicon films, Photoresist processing, 193nm lithography, Bottom antireflective coatings

Showing 5 of 15 publications
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