Mr. Katsuhiro Yamashita Profile

Katsuhiro Yamashita

at FUJIFILM Corp

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Effect of resist polymer molecular weight on EUV lithography

Hidenori Takahashi, Hideaki Tsubaki, Toshiro Itani, Daisuke Kawamura, Katsuhiro Yamashita

Proceedings Volume 7273, 72733S (2009) https://doi.org/10.1117/12.812204

KEYWORDS: Polymers, Line width roughness, Diffusion, Extreme ultraviolet lithography, Photomasks, Electroluminescence, Semiconducting wafers, Glasses, Extreme ultraviolet, Image resolution

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Proceedings Article | 1 April 2009 Paper

Resist material design to improve sensitivity in EUV lithography

Hideaki Tsubaki, Tooru Tsuchihashi, Katsuhiro Yamashita, Tomotaka Tsuchimura

Proceedings Volume 7273, 72733P (2009) https://doi.org/10.1117/12.814086

KEYWORDS: Polymers, Extreme ultraviolet lithography, Yield improvement, Extreme ultraviolet, Ionization, Line width roughness, Semiconducting wafers, Electrodes, Absorption, Chemically amplified resists

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