Mr. Katsuyuki Takahashi Profile

Katsuyuki Takahashi

at Holon Co Ltd

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 16 November 2007 Paper

New method of identification of false or nuisance defects using defect imaging system DIS-05

Hao Zhang, Katsuyuki Takahashi, Hideaki Bando, Yasunobu Kitayama, Akio Sugano, Kenichi Kobayashi

Proceedings Volume 6730, 67303M (2007) https://doi.org/10.1117/12.746667

KEYWORDS: Inspection, Computer aided design, Scanning electron microscopy, Photomasks, Imaging systems, Holons, Defect inspection, Defect detection, Image resolution, Infrared imaging

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Proceedings Article | 20 October 2006 Paper

Mask defect imaging system using backscattered electron images

Katsuyuki Takahashi, Masashi Ataka, Takao Namae

Proceedings Volume 6349, 63493P (2006) https://doi.org/10.1117/12.694530

KEYWORDS: Computer aided design, Photomasks, Imaging systems, Optical inspection, Scanning electron microscopy, Inspection, Air contamination, Defect inspection, Defect detection, Chromium

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Proceedings Article | 9 November 2005 Paper

CD measurement of angled lines on high-end masks and its calibration method

Masashi Ataka, Yasunobu Kitayama, Katsuyuki Takahashi, Naoyuki Nakamura, Izumi Santo, Hitomi Satoh, Norimichi Anazawa

Proceedings Volume 5992, 59924H (2005) https://doi.org/10.1117/12.632016

KEYWORDS: Critical dimension metrology, Calibration, Holons, Computer aided design, Standards development, Prototyping, Reliability, Data conversion, Optical proximity correction, Very large scale integration

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Proceedings Article | 27 December 2002 Paper

Calibration and long-term stability evaluation of photomask CD-SEM utilizing JQA standard

Izumi Santo, Masashi Ataka, Katsuyuki Takahashi, Norimiti Anazawa

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468088

KEYWORDS: Calibration, Line edge roughness, Time metrology, Photomasks, Optical testing, Critical dimension metrology, Statistical analysis, Reticles, Edge roughness, Wafer-level optics

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Proceedings Article | 23 October 1998 Paper

Performance of a high-density optical recording disk using vacuum-evaporation-deposited organic dye film

Yoshihiro Tosaki, Katsuyuki Takahashi, Tomiharu Hosaka, Toshiaki Kunieda

Proceedings Volume 3401, (1998) https://doi.org/10.1117/12.327940

KEYWORDS: Modulation, Optical recording, Optical resolution, Atomic force microscopy, Reflectivity, Refractive index, Standards development, Optical discs, Head, 3D image processing

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