Dr. Kazuhide Watanabe
at e-BEAM Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 16 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Electrons, Amplifiers, Control systems, Distortion, Data processing, Process control, Optical alignment, Data conversion, Electron beam direct write lithography, Semiconducting wafers

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Metals, Silicon, Distortion, Image analysis, Optical alignment, Signal detection, Overlay metrology, Virtual colonoscopy, Back end of line

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electron beams, Amplifiers, Control systems, Photomasks, Beam shaping, Optical alignment, Data conversion, Electron beam direct write lithography, Semiconducting wafers, Vestigial sideband modulation

Proceedings Article | 2 June 2000 Paper
Proc. SPIE. 3998, Metrology, Inspection, and Process Control for Microlithography XIV
KEYWORDS: Microscopes, Digital signal processing, Sensors, Video, Digital filtering, Electron microscopes, Scanning electron microscopy, Image sensors, Signal processing, CRTs

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