Mr. Kazuhiro Hirata Profile

Kazuhiro Hirata

at Sumitomo Heavy Industries Ltd

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Author

Publications (3)

Proceedings Article | 11 May 2004 Paper

Development of over 300 watts average power excimer laser

Kazuhiro Hirata, Joichi Kawamura, Hiroyuki Katou, Kazuaki Sajiki, Makoto Okada

Proceedings Volume 5334, (2004) https://doi.org/10.1117/12.528911

KEYWORDS: Excimer lasers, Pulsed laser operation, Servomechanisms, Annealing, Gas lasers, Laser stabilization, LCDs, High power lasers, Laser development, Laser processing

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Proceedings Article | 16 August 2000 Paper

Maximum 300-W high-power excimer laser

Kazuhiro Hirata, Joichi Kawamura

Proceedings Volume 4065, (2000) https://doi.org/10.1117/12.407328

KEYWORDS: Excimer lasers, Lithium, High power lasers, Electrodes, Pulsed power, Magnetism, LCDs, Energy transfer, Annealing, Prototyping

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Proceedings Article | 3 April 2000 Paper

High-power excimer laser with excellent energy stability

Kazuhiro Hirata, Kazuhiro Saida, Hiroyuki Kato

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380860

KEYWORDS: Excimer lasers, High power lasers, Annealing, Laser stabilization, Ultraviolet radiation, LCDs, Laser development, Gas lasers, Harmonic generation, Silicon

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