The high power excimer laser was developed. We have supplied the 240 watts (800 mJ, 300 Hz) average power excimer laser for industrial use, mainly for TFT LCD annealing. We are going to add the 300 watts (1 J, 300 Hz) average power laser for our line-up. This 300 watts new laser is based on the 240 watts laser, but improved some points. The electrodes size is longer and the electrical power circuit is reinforcement. Laser gas recipe is changed to be good for new system. In our test, we could oscillate over 300 watts average power operation. 310 watts servo operation is able to oscillate over 40 million pulses with less than 1.0 per cent for σ output stability. 330 watts servo operation is able to oscillate over 30 million pulses with almost less than 1.0 per cent for σ output stability. Experimental and theoretical studies of various parameters influencing the laser performance will be continued with
further investigations and future improvements. We have confidence that it will be possible for this laser to produce higher power with long gas life.
A 200-watts average power excimer laser with excellent output energy stability has been developed. The improved laser oscillator can keep an output of 200 watts (667 mJ/pulse, 300 Hz) with servo operation over 25 million pulses. During the operation, the output stability is less than 1.5% for 1-(sigma) and less than 10% for peak to peak value. We have just started to improve the pulsed power circuit for excitation. At first the numerical simulation is executed about this pulsed power circuit using PSpice simulator. The experimental results are in good agreement with the simulation results. The special capacitance transfer method is used for this pulsed power circuit. The result shows that this energy transfer is not enough at the high input voltage. The improvement of the magnetic assist circuit by making full use of the simulation result leads to the complete energy transfer. It is possible for this laser to produce almost 300 watts (1 J, 300 Hz) in the largest output power. Experimental and theoretical studies of various parameters governing the laser performance are used to improve further. It is expected that higher power laser output is produced to be applied for practical use.
A 200 watts excimer laser with excellent energy stability has been developed. The laser is based on the XMR model 5300, and thorough improvements were made over the XMR5300. The laser can produce a stable output of 200 watts (667 mJ, 300 Hz) under servo-controlled operation over 24 hours (greater than 25 million pulses). During this operation, the output fluctuation was found to be less than 1.5% for (sigma) and 10% for peak to peak. Horizontal and vertical beam divergences were less than 1 mrad and 4 mrad, respectively.