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Kazuhiro Segawa
at Windbond Electronics Corp
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Author
Publications (2)
Proceedings Article | 10 April 2024 Poster + Paper
A study on detection of wafer process changes using stand-alone wafer metrology tool
Wataru Yamaguchi, Shinichiro Hirai, Kazuya Kijima, Kazuki Ota, Seiya Miura, Isao Tanaka, Kazuhiro Segawa, Charlie Chen
Proceedings Volume 12955, 129552A (2024) https://doi.org/10.1117/12.3009951
KEYWORDS: Semiconducting wafers, Overlay metrology, Inspection, Signal processing, Optical alignment, Distortion, Signal detection, Film thickness, Metrology, Signal intensity
Proceedings Article | 27 April 2023 Poster + Paper
A study of high-accuracy stand-alone wafer metrology tool for high-productivity of exposure apparatus
Wataru Yamaguchi, Shinichiro Hirai, Ryota Makino, Kazuya Kijima, Seiya Miura, Isao Tanaka, Kazuhiro Segawa, Charlie Chen
Proceedings Volume 12496, 124962B (2023) https://doi.org/10.1117/12.2657243
KEYWORDS: Semiconducting wafers, Deformation, Overlay metrology, Inspection, Metrology, Distortion
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