Mr. Kazuki Azumagawa Profile

Kazuki Azumagawa

at The Institute of Scientific and Industrial Research

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Author

Publications (4)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Analysis of dissolution kinetics of poly(4-hydroxystyrene) with different molecular weight distributions in alkaline aqueous solution using machine learning

Naoki Tanaka, Kyoko Watanabe, Kyoko Matsuoka, Kazuki Azumagawa, Takahiro Kozawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana

Proceedings Volume 11612, 116120R (2021) https://doi.org/10.1117/12.2584067

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Proceedings Article | 21 February 2021 Presentation + Paper

Regression analysis of photodecomposable quencher concentration effects on chemical gradient in chemically amplified extreme ultraviolet resist processes

Kazuki Azumagawa, Takahiro Kozawa

Proceedings Volume 11609, 116090X (2021) https://doi.org/10.1117/12.2583671

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Proceedings Article | 20 September 2020 Presentation

Study on dependence of transient swelling layer formation on molecular weight and dispersion of backbone polymer of chemically amplified EUV resists

Takahiro Kozawa, Kyoko Watanabe, Kyoko Matsuoka, Naoki Tanaka, Kazuki Azumagawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana

Proceedings Volume 11517, 115170G (2020) https://doi.org/10.1117/12.2574877

KEYWORDS: Polymers, Stochastic processes, Dispersion, Extreme ultraviolet, Line edge roughness, Molecules, Photons, Bridges, Chemical reactions, Diffusion

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Proceedings Article | 23 March 2020 Paper

Analysis of trade-off relationships between resolution, line edge roughness, and sensitivity in extreme ultraviolet lithography using machine learning

Kazuki Azumagawa, Takahiro Kozawa

Proceedings Volume 11323, 1132329 (2020) https://doi.org/10.1117/12.2551826

KEYWORDS: Line edge roughness, Extreme ultraviolet lithography, Machine learning, Extreme ultraviolet, Monte Carlo methods, Semiconductors, Information science, Lithography, Industrial chemicals, Photoresist processing

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