Dr. Kazunori K. Shinoda Profile

Dr. Kazunori K. Shinoda

Senior Researcher at Hitachi, Ltd.

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 1 May 2023 Presentation + Paper

Selective isotropic atomic-layer etching of thin films by using dry chemical removal tool

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Masaru Izawa, Kenji Ishikawa, Masaru Hori

Proceedings Volume 12499, 124990E (2023) https://doi.org/10.1117/12.2664547

KEYWORDS: Atomic layer etching, Plasma, Etching, Isotropic etching, X-ray photoelectron spectroscopy

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Proceedings Article | 25 May 2022 Presentation + Paper

Challenge to achieve thermal atomic layer etching of non-volatile materials via stable organometallic complex formation

Yoshihide Yamaguchi, Sumiko Fujisaki, Kazunori Shinoda, Hiroyuki Kobayashi, Kiyohiko Sato, Kohei Kawamura, Kenji Maeda, Masaru Izawa

Proceedings Volume 12056, 1205602 (2022) https://doi.org/10.1117/12.2614198

KEYWORDS: Semiconductor process technologies, Isotropic etching, Dry etching, Vapor etching, Etching, Lanthanum, Cobalt, Adsorption

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Proceedings Article | 20 March 2018 Paper

Isotropic atomic level etching of tungsten using formation and desorption of tungsten fluoride

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Kohei Kawamura, Masaru Izawa, Kenji Ishikawa, Masaru Hori

Proceedings Volume 10589, 105890I (2018) https://doi.org/10.1117/12.2297241

KEYWORDS: Tungsten, Etching, Plasma, Isotropic etching, Annealing, Silicon

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Proceedings Article | 18 November 2008 Paper

Progress with the uncooled electroabsorption modulator integrated DFB laser

Shigeki Makino, Kazunori Shinoda, Takeshi Kitatani, Hiroaki Hayashi, Takashi Shiota, Shigehisa Tanaka, Masahiro Aoki, Noriko Sasada, Kazuhiko Naoe

Proceedings Volume 7135, 713505 (2008) https://doi.org/10.1117/12.803333

KEYWORDS: Modulators, Temperature metrology, Modulation, Single mode fibers, Eye, Reliability, Transceivers, Optical components, Picosecond phenomena, Laser development

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Proceedings Article | 5 October 2006 Paper

1310-nm InGaAlAs short-cavity lasers for 10-Gbit/s low-power-consumption transceivers

Kazunori Shinoda, Takeshi Kitatani, Masahiro Aoki, Masaru Mukaikubo, Kenji Uchida, Kazuhisa Uomi

Proceedings Volume 6352, 63520B (2006) https://doi.org/10.1117/12.691031

KEYWORDS: Transceivers, Vertical cavity surface emitting lasers, Laser development, Modulation, Interfaces, Manufacturing, Continuous wave operation, Laser stabilization, Laser applications, Laser damage threshold

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SPIE Journal Paper | 1 October 2004

Enhancement of emitting power density with a beam-shaping technique for a high-power laser-diode array stack

Hiroyuki Ohashi, Xin Gao, Hiroshi Okamoto, Masaomi Takasaka, Masayuki Saito, Kazunori Shinoda

OE, Vol. 43, Issue 10, (October 2004) https://doi.org/10.1117/12.10.1117/1.1789151

KEYWORDS: High power lasers, Mirrors, Collimation, Beam shaping, Laser sources, Semiconductor lasers, Laser applications, Gas lasers, Photonics, Antireflective coatings

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Proceedings Article | 20 September 1999 Paper

Advances on the fabrication of microchannel plate spatial light modulator based on LiNbO3 waveguide array

Shizhuo Yin, Rui Yang, Francis Yu, Yoshihi Suzuki, Kazunori Shinoda

Proceedings Volume 3801, (1999) https://doi.org/10.1117/12.363926

KEYWORDS: Crystals, Waveguides, Human-machine interfaces, Microchannel plates, Composites, Adhesives, Silicon, Electro optics, Optics manufacturing, Fabrication

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Proceedings Article | 22 September 1997 Paper

Fabrication of LiNbO3 single-crystal fiber array for wideband antenna signal processing

Alex Petrov, Shizhuo Yin, Francis Yu, Oleg Leonov, Yoshiji Suzuki, Kazunori Shinoda

Proceedings Volume 3137, (1997) https://doi.org/10.1117/12.279179

KEYWORDS: Crystals, Signal processing, Adhesives, Fabrication, Antennas, Semiconducting wafers, Microchannel plates, Adaptive optics, Electro optics, Optical amplifiers

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SPIE Journal Paper | 1 May 1995

Three-dimensional microscopy by optical scanning holography

Ting-Chung Poon, Kyu Doh, Bradley Schilling, Ming Wu, Kazunori Shinoda, Yoshiji Suzuki

OE, Vol. 34, Issue 05, (May 1995) https://doi.org/10.1117/12.10.1117/12.201662

KEYWORDS: Holography, Holograms, 3D image reconstruction, Optical scanning, Digital holography, 3D image processing, Microscopy, Stereoscopy, Optical microscopy, Spherical lenses

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Proceedings Article | 23 March 1995 Paper

Optical scanning holographic microscopy

Ting-Chung Poon, Kyu Doh, Bradley Schilling, Ming Wu, Kazunori Shinoda, Yoshiji Suzuki

Proceedings Volume 2412, (1995) https://doi.org/10.1117/12.205342

KEYWORDS: Holograms, Holography, 3D image reconstruction, 3D image processing, Digital holography, Optical scanning, Microscopy, Optical microscopy, Stereoscopy, Spherical lenses

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Proceedings Article | 21 January 1994 Paper

Advances in optical-scanning holography

Bradley Schilling, Ting-Chung Poon, Ming Wu, Kazunori Shinoda, Yoshiji Suzuki

Proceedings Volume 2051, (1994) https://doi.org/10.1117/12.166039

KEYWORDS: Holography, Holograms, Heterodyning, Image restoration, Crystals, Optical scanning, Computer simulations, Optical scanning systems, 3D image reconstruction, Spherical lenses

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Showing 5 of 11 publications

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