Mr. Kazuya Sugawa Profile

Kazuya Sugawa

at Fujitsu Semiconductor Ltd

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Author

Publications (3)

Proceedings Article | 17 October 2008 Paper

Study of influence to transistor properties on the change of OPC pattern

Kazuya Sugawa, Norimasa Nagase, Takahisa Itoh, Mitsuo Sakurai, Tomoyuki Okada

Proceedings Volume 7122, 71223T (2008) https://doi.org/10.1117/12.801547

KEYWORDS: Transistors, Optical proximity correction, Data modeling, Diffusion, Data processing, Device simulation, Connectors, Picosecond phenomena, Microelectronics, Resolution enhancement technologies

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Proceedings Article | 28 August 2003 Paper

Reticle inspection using an image filter method

Tomoyuki Okada, Masahiko Minemura, Kazuhiko Takahashi, Mitsuo Sakurai, Satoshi Akutagawa

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504203

KEYWORDS: Image filtering, Reticles, Scanning electron microscopy, Critical dimension metrology, Optical simulations, Photography, Optical filters, Inspection, Image processing, Optics manufacturing

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Proceedings Article | 1 August 2002 Paper

Simulation method using the image filter method

Masahiko Minemura, Kazuhiko Takahashi, Mitsuo Sakurai, Kazuya Sugawa

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476938

KEYWORDS: Image filtering, Fourier transforms, Optical filters, Image processing, Optical simulations, Semiconducting wafers, Optical proximity correction, Gaussian filters, Photomasks, Manufacturing

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