A wireless, battery-free gyroscope was developed by employing a one-port surface acoustic wave (SAW) reflective delay line, a SAW resonator, and an antenna. Two SAW devices with different center frequencies were simultaneously activated by one antenna with double resonant frequencies. During wireless testing, the developed gyroscope showed clear reflection peaks with high S/N ratios in both the time and frequency domains. Upon rotation of the device, large shifts of the reflection peaks were observed owing to a secondary wave interference effect caused by the Coriolis force that depends on the spinning rate. The measured sensitivity and linearity of the developed gyroscope were, respectively, 1.35 deg/(deg/s) and 0.91, which are promising values for our targeted applications. The temperature and vibration/shock effects were also characterized
A technique of mounting a microlens array (MLA) on a solar cell as an encapsulation layer is presented. The uniform cylinder-shaped MLA was fabricated through simple and cost-effective micromachining processes. The efficiency of the triple-junction InGaP/GaAs/Ge solar cell was considerably enhanced by replacing a bare glass cover with the developed MLA as a surface protection layer. This is attributed to efficient conveyance of the refractive light into bare photoactive regions of the solar cell to avoid the gridlines. Under the optimal mounting condition with an optimal height of optical spacer, the MLA effect was maximized resulting in a 16.8% increase in power conversion efficiency (PCE) than that of the control device. The efficiency of the MLA-packaged solar cell remained for a long time without degradation. The MLA can therefore replace a conventional glass (or film) as a means of encapsulation layer to enhance photovoltaic performances of GaAs-based solar cells.
Planar refractive microlens arrays (MLAs) with high fill-factor were developed utilizing polymer replication technique.
By using isotropically wet-etched quartz as a master mold, we obtained uniformly arrayed plano-concave patterns on
poly(dimethylsiloxane) (PDMS) with a pitch, height, and radius of curvature of 132, 60, and 104.5 μm, respectively. A
high refractive index polymer was coated on the patterned PDMS as a light refraction layer. The measured focal length
of the fabricated MLA was about 900 μm, showing well correspondence with the simulated one. The diameter of the
focused beam spots was 5.4 μm, denoting the excellent light focusing ability.
This paper presents the interference effect of two intersecting waves on a surface acoustic wave(SAW) devices. The
SAW interference device consists of input-output interdigital transducers(IDTs) to transmit and receive a Rayleigh wave
and two interference IDTs to transmit shear-horizontal(SH) waves. The SH-waves intersects perpendicularly and
interferes with the Rayleigh wave at the delay line. We fabricated the SAW devices with center frequencies ranging from
40 MHz to 200 MHz on a 128° YX LiNbO3 wafer. The result of the characteristic test with a network analyzer shows
that the frequency response between the input-output IDTs is shifted by the interference. The center frequency decreases
as the magnitude of the interference wave increases, and the frequency shift is at its maximum when the frequency of the
interference wave coincides with the center frequency of the interference IDTs. The two interference waves applied
simultaneously make the interference effect about twice. Also, interference effect increases with the increase of the
center frequency of the interference IDT. This interference effect of two intersecting SAWs is useful to eliminate the
cross axis sensitivity in designing the SAW gyroscope based on the interference effect.
This paper presents a novel wireless Love wave biosensor platform for multi-functional detection. A 440MHz
wireless and surface acoustic wave (SAW)-based biosensor was developed on a 41° YX LiNbO3 piezoelectric
substrate for the simultaneous detection of Anti- Dinitrophenyl-KLH (anti-DNP) immunoglobulin G (IgG). The
developed biosensor was composed of a SAW reflective delay lines structured by an interdigital transducer
(IDT), shorted grating reflectors, poly(methyl-methacrylate) (PMMA) layer and two sensitive films (Cr/Au).
The PMMA was used for the waveguide layer. Coupling of mode (COM) modeling was conducted to determine
the optimal device parameters prior to fabrication. The fabricated devices were wirelessly characterized by using
the network analyzer as the reader unit. The binding of anti-DNP to DNP receptor molecules induced a change
in phase shifts of the original reflection peaks due to a mass loading effect. The phase shifts increased linearly
with increasing anti-DNP concentration. The measured reflective coefficient S11 in the time domain showed
high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. The time positions of the
reflection peaks were well matched with the predicted values from the simulation. The obtained sensitivity was
167.9°/μg/ml and 44.8°/ μg/ml for the 1st and the 2nd sensing area, respectively.
Various shapes of microlens arrays (MLAs) were developed by utilizing polymer coating on etched quartz substrates.
Spherical and non-spherical plano-concave curvatures were realized via isotropic wet etching of quartz in buffered oxide
etchant (BOE), based on diverse design parameters and calculated etching times. The fabricated curvatures showed a
high fill-factor and uniform elements in the array. By coating a higher refractive index polymer on the etched quartz, the
illuminated light was well focused at the focal plane forming a micronscale light spot array. The experimental focal
length was increased from 39.8 to 49.6 μm, as the shape of microlens was flattened. These results well correspond to
those obtained from an optical simulation.
A microlens array (MLA) was developed based on isotropic wet etching of quartz and coating of polymer on the etched
substrate for maskless lithography application. Through the optimized manufacturing procedures, uniform elements,
excellent light focusing ability, and dense fill factor were obtained. The fabricated MLA has the focal length ranging
from 32.2 to 45.4 μm depending on the etching time and the thickness of the coated polymer. The collimated light was
uniformly focused on the whole focal plane after passing through the fabricated array of microlenses and the size of the
each focused beam was ~1.5 μm. By using the compact imaging ability of the miniaturized lenses, the MLA was applied
to UV photolithography process. The illuminated UV passing the MLA focused on the photoresist, producing micron
scale pattern array. Various sizes and shapes of micropattern arrays were realized onto the PR via controlling the
experimental variables. Even at high temperature, the MLA performances were not changed indicating thermal stability
of the developed MLA.
A surface acoustic wave (SAW)-based gyroscope was developed on a piezoelectric substrate. The developed gyroscope
consists of two SAW oscillators, metallic dots, and absorber. Coupling of mode (COM) modeling was conducted to
determine the optimal device parameters prior to fabrication. Depending on the angular velocity, the difference of the
oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg·s at an angular rate range
of 0~1000 deg/s.
A 440-MHz wireless and passive surface acoustic wave (SAW) microsensor was developed for simultaneous measurement of CO2 and relative humidity (RH). The developed SAW microsensor was composed of SAW reflective delay lines structured by an interdigital transducer (IDT) and several shorted grating reflectors, CO2, and water vapor-sensitive films. A theoretical model was established to predict the response mechanism of the polymer-coated SAW gas sensor. Infusion of CO2 into the chamber and humidity changes induced large phase shifts in the reflection peaks. Good linearity and repeatability were observed in the CO2 concentration of 0~400 ppm and 20~80% RH. The obtained sensitivity was ~2° ppm−1 for CO2 detection and 7.45°/%RH for humidity sensing. Temperature and humidity effects were also investigated during the sensitivity evaluation process.
A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed for
simultaneous measurement of CO2 gas and relative humidity (RH) using a reflective delay line pattern as the
sensor element. The reflective delay line was structured by an inter-digital transducer (IDT) and several shorted
grating reflectors positioned both sites of the IDTs along the SAW propagation direction. A Teflon AF 2400 film
with large solubility, permeability, and selectivity towards to CO2 and a hydrophilic SiO2 layer for water vapor
sensing are used as the sensitive film and deposited onto the piezoelectric substrate. A simulation on the SAW
device was performed using the coupling of modes (COM). The measured reflection coefficient S11 in time domain
of the fabricated SAW device shows sharp reflection peaks with high signal-to-noise (S/N) ratio, small signal
attenuation, and few spurious peaks. During the CO2 and humidity testing, high sensitivity (~2o ppm-1 for CO2
detection and 7.45o/%RH for humidity sensing), good linearity and repeatability were observed in the CO2
concentration of 50~400ppm and humidity of 20~80%RH. Temperature and humidity compensations were also
investigated during the sensitivity evaluation process.
This paper presents a sensitivity evaluation of a love wave sensor with multilayer structure consisting of polymethyl
methacrylate (PMMA)/SiO2/41o YX LiNbO3. A theoretical model is presented to describe wave propagation in love
wave devices with multilayered structure on large piezoelectric substrate. A complex dispersion equation expanded into
Taylor series was presented to describe the lossy mechanism of the PMMA layer. Using the gold film as the sensitive
interface, the mass loading sensitivity of the love wave sensor for biochemical application was evaluated theoretically,
and the effects from the SiO2 and PMMA on the sensor sensitivity were investigated to allow the design of an optimized
structure. From the calculated results, the optimal thicknesses of SiO2 and PMMA in the multilayered structure were
determined, and the sensitivity comparison between love waves in LiNbO3/SiO2/PMMA and LiNbO3/PMMA was
studied, which shows that there is larger mass loading sensitivity in love wave devices with multilayered structure.
This paper presents a configuration of a novel surface acoustic wave (SAW) micro-electro-mechanical-systems (MEMS)
interdigital transducer (IDT) gyroscope different from the current SAW MEMS-IDT gyroscope consists of a two-port
SAW resonator and a delay line as the sensor, this paper provides a new configuration of SAW gyroscope based on the
interference effect of two crossed SAWs, one is induced by the Coriolis force from the input rotation, and the other is
from the SAW device with same operation frequency. A differential structure of two delay line oscillator is used to
compensate the temperature effect. Based on the coupling of modes (COM) simulation, an 80MHz two ports SAW
resonator and dual-delay line were fabricated and characterized by the HP network analyzer. In the primary gyroscope
experimental results, a frequency change of 2500Hz was observed at rate of 500 deg/s from the SAW delay line by
interference effect between the secondary SAW induced by Coriolis force and the running SAW from the delay line.
KEYWORDS: Reflectors, Sensors, Phase shifts, Temperature sensors, Network security, Finite element methods, Temperature metrology, Microsensors, Reflectivity, Microelectromechanical systems
This paper presents an integrated multifunctional microsensor based on 440MHz surface acoustic wave (SAW) reflective delay line on 41° YX LiNbO3. A pressure sensor, a temperature sensor, and radio frequency identification (RFID) tag were integrated on two-bonded piezoelectric substrates. The pressure sensor was placed on the top plate, whereas the RFID tag and temperature sensor were located on the bottom substrate. Finite Element Methods (FEM) and Coupling of mode (COM) modeling were performed to extract the optimal design parameters before fabrication. The fabricated sensor was wirelessly characterized through the Network Analyzer. Sharp reflection peaks with high S/N ratio were observed. Obtained temperature and pressure sensitivity are ~10°/°C and ~2.9°/kPa, respectively.
This paper describes new type of MEMS spiral inductor using benzocyclobutene (BCB) for wireless applications. BCB consists of several attractive features for on-chip RF inductors, i.e., high resistivity, low dielectric constant and lower curing temperature. The fabricated inductor coils had 2.5 turns with 20μm for width, 20μm for pitch and the thickness of 2μm. The inductor coils are suspended about 12μm from the bottom BCB substrate. Our measured quality factor was 19 at 3.1GHz frequency. The measured inductance was approximately 3nH and it remained constant up to 10 GHz. The self resonant frequency (SRF) was at 13.6GHz.
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