Dr. Kehan Tian Profile

Dr. Kehan Tian

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Publications (2)

SPIE Journal Paper | 10 February 2023

Diffractive optical element design based on vector diffraction theory and improved PSO-SA algorithm

Yu Yan, Zhentao Fan, Guofang Sun, Kehan Tian

OE, Vol. 62, Issue 02, 025103, (February 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.2.025103

KEYWORDS: Diffraction, Diffractive optical elements, Design and modelling, Mathematical optimization, Particle swarm optimization, Finite-difference time-domain method, Particles, Beam splitters, Optical engineering, Algorithms

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Proceedings Article | 18 November 2019 Open Access

Improvements of diffractive optical element uniformity and zero order performance using lithographic process parameter optimization method (withdrawal notice)

Guowei Zhang, Xiaodong Yin, Kehan Tian

Proceedings Volume 11188, 111880X (2019) https://doi.org/10.1117/12.2535466

KEYWORDS: Diffractive optical elements, Lithography, Critical dimension metrology, Diffraction, Optical alignment, Plasma etching, Optical fabrication, Device simulation, Nanoimprint

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