Dr. Kelly A. Nowak
Research Associate III at Brewer Science Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Optical lithography, Etching, Polymers, Metals, Coating, Dielectrophoresis, Scanning electron microscopy, Liquids, Chemical mechanical planarization, Bottom antireflective coatings

Proceedings Article | 24 August 2001 Paper
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Semiconductors, Lithography, Optical lithography, Etching, Polymers, Manufacturing, Scanning electron microscopy, Photoresist materials, Absorbance, Semiconducting wafers

Proceedings Article | 26 April 2001 Paper
Proc. SPIE. 4404, Lithography for Semiconductor Manufacturing II
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Copper, Manufacturing, Reflectivity, Scanning electron microscopy, Photoresist materials, Semiconducting wafers

Proceedings Article | 11 June 1999 Paper
Proc. SPIE. 3678, Advances in Resist Technology and Processing XVI
KEYWORDS: Data modeling, Etching, Polymers, Silicon, Chemistry, Reflectivity, Photoresist materials, Absorbance, Plasma etching, Plasma

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top