Ken-ichi Matsumura
at HTL Co Japan Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 127510J (2023) https://doi.org/10.1117/12.2686670
KEYWORDS: Manufacturing, Mask making, Manufacturing equipment, Inspection, Artificial intelligence, Semiconductors, Classification systems, Photomasks

Proceedings Article | 29 September 2023 Paper
H. Hamada, K. Matsumura, A. Gupta, N. Das, A. Abu, H. Agarwal, S. Acharya, K. Egami, K. Nakanishi, S. Kanai, F. Yoshida, A. Acharya
Proceedings Volume 12915, 129150K (2023) https://doi.org/10.1117/12.2684573
KEYWORDS: Artificial intelligence, Reflection, Image classification, Deep learning, Photomasks, Inspection, Inspection equipment, Education and training, Defect detection, Chromium

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