Mr. Ken-ichi Matsumura Profile

Ken-ichi Matsumura

at HTL Co Japan Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 21 November 2023 Presentation + Paper

Providing solutions for replacement of legacy tools with advanced features

H. Hamada, K. Egami, S. Kanai, A. Gupta, S. Murakami, K. Nakanishi, K. Matsumura, A. Acharya

Proceedings Volume 12751, 127510J (2023) https://doi.org/10.1117/12.2686670

KEYWORDS: Manufacturing, Mask making, Manufacturing equipment, Inspection, Artificial intelligence, Semiconductors, Classification systems, Photomasks

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Proceedings Article | 29 September 2023 Paper

Approach to AI defect classification for photomask inspection equipment using EOI-AI software package developed by HTL

H. Hamada, K. Matsumura, A. Gupta, N. Das, A. Abu, H. Agarwal, S. Acharya, K. Egami, K. Nakanishi, S. Kanai, F. Yoshida, A. Acharya

Proceedings Volume 12915, 129150K (2023) https://doi.org/10.1117/12.2684573

KEYWORDS: Artificial intelligence, Reflection, Image classification, Deep learning, Photomasks, Inspection, Inspection equipment, Education and training, Defect detection, Chromium

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