Dr. Kenji Wada Profile

Dr. Kenji Wada

at FUJIFILM Corp

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Author

Publications (3)

Proceedings Article | 9 April 2007 Paper

Novel materials design for immersion lithography

Kenji Wada, Shinichi Kanna, Hiromi Kanda

Proceedings Volume 6519, 651908 (2007) https://doi.org/10.1117/12.712096

KEYWORDS: Line width roughness, Polymers, Immersion lithography, Digital watermarking, Thin film coatings, Polymer thin films, Fluorine, Photography, Diffusion, Coating

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Proceedings Article | 11 April 2006 Paper

Materials and process parameters study on ArF immersion defectivity

Shinichi Kanna, Haruki Inabe, Kei Yamamoto, Toshiaki Fukuhara, Shinji Tarutani, Hiromi Kanda, Wada Kenji, Kunihiko Kodama, Koji Shitabatake

Proceedings Volume 6153, 615308 (2006) https://doi.org/10.1117/12.657805

KEYWORDS: Digital watermarking, Polymers, Lithography, Materials processing, Water, Photoresist processing, Silicon films, Scanners, Liquids, Head

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Proceedings Article | 16 August 1996 Paper

Optical CT imaging in highly scattering media by extraction of photons preserving initial polarization

Hiromichi Horinaka, K. Hashimoto, Kenji Wada, T. Umeda, Yoshio Cho

Proceedings Volume 2873, (1996) https://doi.org/10.1117/12.246179

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