Dr. Kenneth M. Fahy Profile

Dr. Kenneth M. Fahy

Postgraduate Student at NewLambda Technologies

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 August 2010 Paper

Kenneth Fahy, Fergal O'Reilly, Enda Scally, Paul Sheridan

Proceedings Volume 7802, 78020K (2010) https://doi.org/10.1117/12.860747

KEYWORDS: Extreme ultraviolet, Mirrors, Liquids, Metals, Plasma, Tin, EUV optics, Zemax, X-rays, Coating

Proceedings Article | 3 June 2005 Paper

K. Fahy, E. Sokell, G. O'Sullivan, A. Cummings, A. Aguilar, J. Gillaspy, J. Pomeroy, J. Tan

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.605209

KEYWORDS: Ions, Electron beams, Xenon, Spectroscopy, Plasma, Extreme ultraviolet, Tin, Laser development, Extreme ultraviolet lithography, Ionization

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