Mr. Kenneth Jantzen Profile

Kenneth Jantzen

Engineer at Siemens EDA

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 28 April 2023 Poster + Paper

CPU time prediction using machine learning for post-tapeout flow runs

Maram Salah, Pascal Gilgenkrantz, Wooil Han, Ahmed Hamed Fathi Hamed, Stephen Kim, Roberto Ramsis, Ken Jantzen

Proceedings Volume 12495, 124951O (2023) https://doi.org/10.1117/12.2657666

KEYWORDS: Data analysis, Data modeling, Machine learning, Feature extraction

Read Abstract +

Proceedings Article | 16 October 2019 Presentation + Paper

Creating nonideality: enabling cross-platform process matching solutions with MPC (and a lot of hard work)

Charles Whiting, Jed Rankin, Daniel Hill, Matthew Leuthold, Michaela Wentz, Adam Smith, Ingo Bork, Peter Buck, Robin Chia, Bharadwaj Durvasula, Gazi Huda, Ken Jantzen, Jianliang Li, Joerg Mellmann, Kushlendra Mishra, Nageswara Rao, Malavika Sharma, Rachit Sharma

Proceedings Volume 11148, 1114805 (2019) https://doi.org/10.1117/12.2538347

KEYWORDS: Photomasks, Data modeling, Optical proximity correction, Critical dimension metrology, Calibration, Lithography, Semiconducting wafers, Manufacturing, Opacity, Etching

Read Abstract +

SPIE Journal Paper | 28 April 2015

Enabling scanning electron microscope contour-based optical proximity correction models

Francois Weisbuch, Kenneth Jantzen

JM3, Vol. 14, Issue 02, 021105, (April 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.2.021105

KEYWORDS: Scanning electron microscopy, Optical proximity correction, Calibration, Electron microscopes, Critical dimension metrology, Data modeling, Metrology, Performance modeling, Model-based design, Cadmium

Read Abstract +

Proceedings Article | 18 March 2015 Paper

Calibrating etch model with SEM contours

François Weisbuch, A. Omran, Kenneth Jantzen

Proceedings Volume 9426, 94261T (2015) https://doi.org/10.1117/12.2180271

KEYWORDS: Etching, Calibration, Scanning electron microscopy, Data modeling, Optical proximity correction, Performance modeling, Statistical modeling, Lithography, Optical lithography, Semiconducting wafers

Read Abstract +

Proceedings Article | 18 March 2015 Paper

Comparison of OPC job prioritization schemes to generate data for mask manufacturing

Kenneth Jantzen, Travis Lewis, Vijay Veeraraghavan, Minyoung Park, Stephen Kim, Gordon Russell, Mark Simmons

Proceedings Volume 9427, 942711 (2015) https://doi.org/10.1117/12.2086927

KEYWORDS: Optical proximity correction, Photomasks, Manufacturing, Data processing, Front end of line, Back end of line, Visualization, Design for manufacturability, Integrated circuits, Semiconductors

Read Abstract +

Proceedings Article | 31 March 2014 Paper

Bringing SEM-contour based OPC to production

François Weisbuch, Kar Kit Koh, Kenneth Jantzen

Proceedings Volume 9052, 905224 (2014) https://doi.org/10.1117/12.2048288

KEYWORDS: Data modeling, Calibration, Scanning electron microscopy, Optical proximity correction, Performance modeling, Cadmium, Metrology, Critical dimension metrology, Statistical modeling, Semiconducting wafers

Read Abstract +

Proceedings Article | 13 March 2012 Paper

OPC model prediction capability improvements by accounting for mask 3D-EMF effects

Dong Qing Zhang, Edita Tejnil, Angeline Chung, Thuy Do, John Sturtevant, Kenneth Jantzen, Jacky Cheng, Christian Zuniga, Jessy Schramm, Yee Mei Foong

Proceedings Volume 8326, 83261R (2012) https://doi.org/10.1117/12.916863

KEYWORDS: 3D modeling, Data modeling, Photomasks, Calibration, Performance modeling, Semiconducting wafers, Optical proximity correction, Systems modeling, Panoramic photography, System on a chip

Read Abstract +

Proceedings Article | 23 March 2009 Paper

Compute resource management and TAT control in mask data prep

Minyoung Park, Kenneth Jantzen, Hien Vu, Ahmed Nouh

Proceedings Volume 7272, 727216 (2009) https://doi.org/10.1117/12.814236

KEYWORDS: Data centers, Optical proximity correction, Control systems, Resolution enhancement technologies, Solids, Visualization, Optical components, Optical resolution, Optical calibration, Computing systems

Read Abstract +

Proceedings Article | 17 October 2008 Paper

Compute resource management and turn around time control in mask data prep

Emile Sahouria, Scott Goad, Kenneth Jantzen, Travis Lewis, Steffen Schulze, Minyoung Park, Ahmed Nouh

Proceedings Volume 7122, 71222O (2008) https://doi.org/10.1117/12.801544

KEYWORDS: Databases, Optical proximity correction, Data centers, Metals, Photomasks, Control systems, Data processing, Resolution enhancement technologies, Optical components, Optical resolution

Read Abstract +

Proceedings Article | 16 November 2007 Paper

Reduction of layout complexity for shorter mask write-time

Scott Goad, Kenneth Jantzen, Steffen Schulze, Travis Lewis, Emile Sahouria, Hien Vu, Jianlin Wang, Sean Hannon

Proceedings Volume 6730, 67303K (2007) https://doi.org/10.1117/12.746986

KEYWORDS: Source mask optimization, Photomasks, Optical proximity correction, Reticles, Manufacturing, Optical alignment, Tolerancing, Lithography, Data processing, Semiconducting wafers

Read Abstract +

Proceedings Article | 30 July 2002 Paper

Subresolution assist feature implementation for high-performance logic gate-level lithography

James Bruce, Carlos Fonseca, Jed Rankin, William Chu, Allen Gabor, Woo-Hyeong Lee, Kenneth Jantzen, Ronald Gordon, Lars Liebmann, Karl Muller, Mark Lavin, Richard Ferguson, Patrick Varekamp, Franz Zach, Mukesh Khare

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474591

KEYWORDS: SRAF, Optical proximity correction, Logic, Binary data, Lithography, Model-based design, Image enhancement, Printing, Manufacturing, Lithographic illumination

Read Abstract +

Proceedings Article | 26 July 1999 Paper

Lithographic implications for Cu/low-k integration

Nora Chen, Kenneth Jantzen, Steven Schneider, James Marsh, Rebecca Mih

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354401

KEYWORDS: Dielectrics, Photomasks, Etching, Lithography, Silicon, Carbon, Reflectivity, Oxides, Metals, Photoresist materials

Read Abstract +

Showing 5 of 12 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years