Dr. Kenneth G. Kreider
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 April 2004 Paper
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Semiconducting wafers, Sensors, Thin films, Temperature metrology, Resistance, Lithography, Wafer testing, Silicon, Platinum, Data modeling

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