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Dr. Kevin E. Burcham
Senior Application Scientist & Project Manager
SPIE Involvement:
Author | Science Fair Judge
Publications (1)
Proceedings Article | 2 March 1993 Paper
Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide
Kevin Burcham, Gregory De Brabander, Joseph Boyd
Proceedings Volume 1793, (1993) https://doi.org/10.1117/12.141218
KEYWORDS: Waveguides, Silicon, Integrated optics, Semiconducting wafers, Sensors, Lithium, Low pressure chemical vapor deposition, Optical simulations, Optical testing, Environmental sensing
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