CONFERENCE PROCEEDINGS
Advanced Search
Kevin Duong
Customer Service Manager at Micro Lithography Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 25 May 2010 Paper
Evaluation of easily removable pellicle adhesive
Nancy Zhou, Monica Barrett, Robert Nolan, Dennis Plouffe, Jason Ritter, Alfred Wagner, Michael Caterer, Takashi Mizoguchi, Satoshi Akutagawa, Kevin Duong, Corbin Imai, C. Wang
Proceedings Volume 7748, 774810 (2010) https://doi.org/10.1117/12.865042
KEYWORDS: Adhesives, Pellicles, Photomasks, Distortion, Quartz, Manufacturing, Inspection, Fermium, Frequency modulation, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top