Dr. Kevin Gao
at HMI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Metrology, Defect detection, Data modeling, Calibration, Pattern recognition, Inspection, Wafer inspection, Semiconducting wafers, Failure analysis, Stochastic processes

Proceedings Article | 18 October 2018 Presentation + Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Metrology, Liquid phase epitaxy, Error analysis, Inspection, Photomasks, Extreme ultraviolet, Cadmium sulfide, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

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