Mr. Kevin J. Moeggenborg Profile

Kevin J. Moeggenborg

Senior Scientist at Entegris, Inc.

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Proceedings Article | 29 August 2008 Paper

Low-scatter bare aluminum optics via chemical mechanical polishing

Kevin Moeggenborg, Carlos Barros, Stanley Lesiak, Nevin Naguib, Stan Reggie

Proceedings Volume 7060, 706002 (2008) https://doi.org/10.1117/12.795189

KEYWORDS: Aluminum, Mirrors, Chemical mechanical planarization, Bidirectional reflectance transmission function, Polishing, Surface finishing, Light scattering, Surface roughness, Single point diamond turning, Diamond

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Traditionally, aluminum optics have been produced via a combination of machining, lapping, and diamond turning techniques. The surface roughness and diffraction grating effects resultant from diamond turning have largely limited the use of these optics to IR applications. Work arounds for this problem have included nickel coatings which are subsequently polished to a required finish for use in visible and/or ultraviolet spectra. Unfortunately, this introduces additional costs as well as bimetallic effects that can limit the application of such components. We have developed chemical mechanical polishing (CMP) techniques that allow high quality optical surfaces to be produced on bare aluminum alloy such as 6061-T6. Alloy properties such as grain size, inclusions, and voids can impact all types of finishing processes. The CMP method, however, has been very robust in polishing performance over a range of alloy types and properties. Surface roughness <20 Å rms is readily attainable with this process, and values below 10 Å have been produced with proper process conditions and alloy properties. The monolithic mirrors produced via CMP techniques have been compared against other current alternatives such as diamond turned aluminum, nickel coated aluminum, and aluminized glass. Data indicate the aluminum mirrors produced via CMP can provide performance improvements versus the alternatives based on measurements comparing parameters such as surface roughness, surface quality, reflectivity, and bidirectional reflectance distribution function.

Proceedings Article | 31 August 2006 Paper

Super-polished aluminum mirrors through the application of chemical mechanical polishing techniques

Kevin Moeggenborg, Tamara Vincer, Stanley Lesiak, Roman Salij

Proceedings Volume 6288, 62880L (2006) https://doi.org/10.1117/12.681043

KEYWORDS: Polishing, Chemical mechanical planarization, Surface finishing, Aluminum, Mirrors, Coating, Metals, Diamond turning, Abrasives, Reflectivity

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Chemical Mechanical Polishing, also referred to Chemical Mechanical Planarization (CMP), is one of the enabling technologies which allows the fabrication of high performance multi-level metal structures in IC fabrication. In this paper we will discuss the specific application of CMP techniques to aluminum mirror polishing and the resultant super polished finish obtained. Current aluminum mirror processing methods use combinations of machining, lapping and diamond turning operations to achieve required surface accuracy and quality. Optimum results from diamond turning yields surface figure with an error of no less than half a wave and surface roughness no less than 50 angstrom aluminum substrates. In addition, diamond turning puts "grooves" onto the surface that act as a diffractive element resulting in specular beam power loss and ghost images. Often these diffractive and scatter effects, inherent to grooved surfaces, are too severe to provide adequate performance in the UV and visible range. Further, the low signal to noise ratio of the optical system reduces resolution and the overall efficiency of the optical system. A new procedure for polishing bare 6061-T6 Aluminum monolithic mirrors using Chemical Mechanical Planarization (CMP) slurry and techniques yields extremely high quality, low scatter mirrors. Planar aluminum mirrors with flatness equivalent to lambda/10 and R_a <2 nm have been polished and measured on a Veeco NT3300 white light Interferometer (at 20X). Comparison of the power spectral density curves of mirrors produced via CMP with those presently produced with diamond turning shows reduction across the range of spatial frequencies (1-10³ mm^-1) and elimination of the grooving frequency. Both white light interferometer and AFM images show the polished surfaces to be smooth, pit free with no pull outs.

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