Mr. Kin-Chung Chan Profile

Kin-Chung Chan

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Publications (2)

Proceedings Article | 15 July 2003 Paper

LithoCell-integrated critical dimension metrology

J. Stirton, Clinton Miller, Anita Viswanathan, Makoto Miyagi, Lawrence Lane, Michael Laughery, Tarun Parikh, Kin Chung Chan, Apo Sezginer

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485241

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Particles, Time metrology, Control systems, Metals, Scanning electron microscopy, Tin, Process control

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Proceedings Article | 16 July 2002 Paper

Complementary use of scatterometry and SEM for photoresist profile and CD determination

Yuya Toyoshima, Isao Kawata, Yasutsugu Usami, Yasuhiro Mitsui, Apo Sezginer, Eric Maiken, Kin-Chung Chan, Kenneth Johnson, Dean Yonenaga

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473458

KEYWORDS: Scatterometry, Scanning electron microscopy, Semiconducting wafers, Photoresist materials, Scatter measurement, Critical dimension metrology, Process control, Databases, Metrology, Cadmium

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