Mr. Kirolos Gamal George/Hanna Profile

Kirolos Gamal George/Hanna

QA Engineer / Software Testing Engineer at Siemens EDA

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Publications (1)

Proceedings Article | 28 March 2014 Paper

Model based multilayers fix for litho hotspots beyond 20nm node

Asmaa Rabie, Kareem Madkour, Kirolos George, Wael ElManhawy, Jean-Marie Brunet, Joe Kwan

Proceedings Volume 9053, 90530F (2014) https://doi.org/10.1117/12.2045744

KEYWORDS: Double patterning technology, Metals, Photomasks, Lithography, Manufacturing, Visualization, Design for manufacturing, Multilayers, Bridges, Standards development

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