Dr. Kiwamu Takehisa
Senior Scientist at Lasertec Corp
SPIE Involvement:
Author | Editor
Publications (23)

Proceedings Article | 9 April 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Reticles, Defect detection, Deep ultraviolet, Particles, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

Proceedings Article | 25 November 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Defect detection, Deep ultraviolet, Inspection, Image resolution, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Defect inspection

Proceedings Article | 7 October 2019 Paper
Proc. SPIE. 11162, High Power Lasers: Technology and Systems, Platforms, Effects III
KEYWORDS: Satellites, Optical simulations, Chemical lasers, Atmospheric propagation, Defense systems, Space based lasers

Proceedings Article | 9 October 2018 Presentation + Paper
Proc. SPIE. 10798, High-Power Lasers: Technology and Systems, Platforms, and Effects II
KEYWORDS: Mirrors, Oxygen, Laser resonators, Helium, Missiles, Chemical lasers, Atmospheric propagation, Defense systems, Chemical oxygen iodine lasers, Laser missile defense

Proceedings Article | 21 October 2016 Paper
Proc. SPIE. 9990, High-Power Lasers 2016: Technology and Systems
KEYWORDS: Mirrors, Laser energy, Laser beam propagation, Oxygen, Missiles, Chemical lasers, Atmospheric propagation, Defense systems, Space based lasers, Absorption

Showing 5 of 23 publications
Proceedings Volume Editor (2)

Conference Committee Involvement (2)
Photomask Japan 2018
18 April 2018 | Yokohama, Japan
Photomask Japan 2017
5 April 2017 | Yokohama, Japan
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