Mr. Kiyoshi Ogawa Profile

Kiyoshi Ogawa

Manager at Lasertec Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 5 September 2001 Paper

Phase defect inspection by differential interference

Kiyoshi Ogawa, J. Kodama, K. Machida, Katsuyoshi Nakashima, Yaichiro Watakabe

Proceedings Volume 4409, (2001) https://doi.org/10.1117/12.438389

KEYWORDS: Photomasks, Defect inspection, Prisms, Reflectivity, Inspection, Defect detection, Phase shifting, Phase interferometry, Interferometers, Databases

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Conference Committee Involvement (5)

Photomask and Next Generation Lithography Mask Technology XIV

17 April 2007 | Yokohama, Japan

Photomask and Next-Generation Lithography Mask Technology XIII

18 April 2006 | Yokohama, Japan

Photomask and Next-Generation Lithography Mask Technology XII

13 April 2005 | Yokohama, Japan

Photomask and Next-Generation Lithography Mask Technology XI

14 April 2004 | Yokohama, Japan

Photomask and NGL Mask Technology X

16 April 2003 | Yokohama, Japan

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