Dr. Klaus Prume Profile

Dr. Klaus Prume

at aixACCT Systems GmbH

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Publications (1)

Proceedings Article | 12 April 2007 Paper

Tensile and compressive stress dependency of the transverse (e31,f) piezoelectric coefficient of PZT thin films for MEMS devices

Klaus Prume, Paul Muralt, Thorsten Schmitz-Kempen, Stephan Tiedke

Proc. SPIE. 6526, Behavior and Mechanics of Multifunctional and Composite Materials 2007

KEYWORDS: Thin films, Ferroelectric materials, Piezoelectric effects, Electrodes, Sol-gels, Microelectromechanical systems, Actuators, Thin film devices, Dielectrics, Silicon

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