Mr. Kohei Okuda Profile

Kohei Okuda

at Osaka Univ

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Author

Publications (3)

Proceedings Article | 28 September 2015 Paper

The measurement of an aspherical mirror by three-dimensional nanoprofiler

Yusuke Tokuta, Kenya Okita, Kohei Okuda, Takao Kitayama, Motohiro Nakano, Shun Nakatani, Ryota Kudo, Kazuya Yamamura, Katsuyoshi Endo

Proceedings Volume 9628, 962814 (2015) https://doi.org/10.1117/12.2191040

KEYWORDS: Mirrors, Error analysis, Head, Photovoltaics, Interferometers, Optical components, Laser optics, Synchrotron radiation, Extreme ultraviolet lithography, Lasers

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Proceedings Article | 5 September 2014 Paper

A new optical head tracing reflected light for nanoprofiler

K. Okuda, K. Okita, Y. Tokuta, T. Kitayama, M. Nakano, R. Kudo, K. Yamamura, K. Endo

Proceedings Volume 9206, 920602 (2014) https://doi.org/10.1117/12.2061703

KEYWORDS: Mirrors, Control systems, Motion measurement, Head, Optical amplifiers, Sensors, Fizeau interferometers, Actuators, Optical components, Error analysis

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Proceedings Article | 15 October 2013 Paper

Development of a high-speed nanoprofiler using normal vector tracing method for high-accuracy mirrors

Kohei Okuda, Takao Kitayama, Koji Usuki, Takuya Kojima, Kenya Okita, Junichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo

Proceedings Volume 8884, 888410 (2013) https://doi.org/10.1117/12.2029133

KEYWORDS: Mirrors, Photovoltaics, Spherical lenses, X-rays, Head, Optical components, Algorithm development, Synchrotron radiation, Extreme ultraviolet, Extreme ultraviolet lithography

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