Mr. Kohei Yanagisawa Profile

Kohei Yanagisawa

at Toppan Printing Co., Ltd.

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Publications (3)

Proceedings Article | 26 September 2019 Paper

Evaluation of neighborhood pattern matching algorithm in MPC processing

Kohei Yanagisawa, Kota Kobayashi, Kiyoshi Kageyama, Sebastian Munoz, Fabian Saso, Parikshit Kulkarni, John Valadez, Kokoro Kato

Proceedings Volume 11148, 111481K (2019) https://doi.org/10.1117/12.2538626

KEYWORDS: Process modeling, Manufacturing, Algorithm development, Software development, Photomasks, Optical proximity correction, Time metrology

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Proceedings Article | 27 June 2019 Paper

MPC model sensitivity analysis: model ambit vs. correction runtime

Alex Zepka, John Valadez, Parikshit Kulkarni, Kohei Yanagisawa, Kota Kobayashi, Kiyoshi Kageyama

Proceedings Volume 11178, 1117808 (2019) https://doi.org/10.1117/12.2535707

KEYWORDS: Photomasks, Data modeling, Calibration, Metrology, Etching, Electrons, Lithography, Optical proximity correction, Cadmium, Semiconducting wafers

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Proceedings Article | 17 October 2008 Paper

Layout driven DNIR

Kiyoshi Kageyama, Kohei Yanagisawa, Atsushi Kobayashi, Shinji Kunitani, Yoji Tonooka

Proceedings Volume 7122, 71223H (2008) https://doi.org/10.1117/12.801940

KEYWORDS: Inspection, Photomasks, Manufacturing, Optical proximity correction, Scattering, Neodymium, Printing, Carbon monoxide, Semiconductors, Photomask technology

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