Koichi Moriizumi
Managing Director at Lasertec Corp
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Organic light emitting diodes, Particles, Light scattering, Manufacturing, Laser development, Inspection, LCDs, Photomasks, Digital image correlation, Optics manufacturing

Proceedings Article | 10 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Reticles, Defect detection, Manufacturing, Inspection, Parallel processing, Photomasks, Factory automation, Semiconducting wafers, Wafer manufacturing, Defect inspection

Proceedings Article | 7 July 1997 Paper
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Lithography, Spindles, Opacity, Error analysis, Photomasks, Beam shaping, Optical proximity correction, Mask making, Binary data, Laser systems engineering

Proceedings Article | 31 October 1996 Paper
Proc. SPIE. 2908, Machine Vision Applications, Architectures, and Systems Integration V
KEYWORDS: Electron beams, Digital signal processing, Inspection, Parallel processing, Neural networks, Very large scale integration, Photomasks, Raster graphics, Computer aided design, Data conversion

Proceedings Article | 24 July 1996 Paper
Proc. SPIE. 2793, Photomask and X-Ray Mask Technology III
KEYWORDS: Electron beams, Silicon, Solids, Microelectronics, Photomasks, Charge-coupled devices, Beam shaping, Mask making, Critical dimension metrology, Tolerancing

Showing 5 of 8 publications
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