Mr. Koji Arai Profile

Koji Arai

at Hitachi High-Technologies Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2013 Paper

Fundamentals of overlay measurement and inspection using scanning electron-microscope

T. Kato, Y. Okagawa, O. Inoue, K. Arai, S. Yamaguchi

Proceedings Volume 8681, 86812Q (2013) https://doi.org/10.1117/12.2011046

KEYWORDS: Overlay metrology, Scanning electron microscopy, Semiconducting wafers, Scanners, Inspection, Optical testing, Wafer-level optics, Optical alignment, Control systems, Silicon

Read Abstract +

Proceedings Article | 12 July 2008 Paper

Development of laser interferometric high-precision geometry monitor for JASMINE

Yoshito Niwa, Koji Arai, Akitoshi Ueda, Masaaki Sakagami, Naoteru Gouda, Yukiyasu Kobayashi, Yoshiyuki Yamada, Taihei Yano

Proceedings Volume 7010, 70104L (2008) https://doi.org/10.1117/12.788734

KEYWORDS: Mirrors, Interferometers, Heterodyning, Interferometry, Telescopes, Laser development, Motion measurement, Space telescopes, Signal detection, Actuators

Read Abstract +

Proceedings Article | 15 June 2006 Paper

Laser interferometric high-precision angle monitor for JASMINE

Yoshito Niwa, Koji Arai, Masaaki Sakagami, Naoteru Gouda, Yukiyasu Kobayashi, Yoshiyuki Yamada, Taihei Yano

Proceedings Volume 6265, 626546 (2006) https://doi.org/10.1117/12.671400

KEYWORDS: Mirrors, Fabry–Perot interferometers, Sensors, Near field optics, Ferroelectric materials, Transmission electron microscopy, Interferometry, Motion measurement, Actuators, Wavefront sensors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years