Koji Arai
at Hitachi High-Technologies Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Wafer-level optics, Scanners, Silicon, Inspection, Control systems, Optical testing, Scanning electron microscopy, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 12 July 2008 Paper
Proc. SPIE. 7010, Space Telescopes and Instrumentation 2008: Optical, Infrared, and Millimeter
KEYWORDS: Actuators, Telescopes, Mirrors, Interferometers, Laser development, Interferometry, Space telescopes, Heterodyning, Motion measurement, Signal detection

Proceedings Article | 15 June 2006 Paper
Proc. SPIE. 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter
KEYWORDS: Actuators, Mirrors, Fabry–Perot interferometers, Ferroelectric materials, Sensors, Interferometry, Wavefront sensors, Transmission electron microscopy, Motion measurement, Near field optics

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