Prof. Konstantin V. Rudenko
at Valiev Institute of Physics and Technology RAS
SPIE Involvement:
Author | Editor
Publications (29)

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Semiconductors, Magnesium, Graphene, Metals, Dielectrics, Silicon, Doping, Transistors, Field effect transistors, Plasma etching

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Fabrication, Oxides, Annealing, Surface roughness, Oxygen, Scanning electron microscopy, Acousto-optics, Atmospheric modeling, Atmospheric optics, Absorption

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Oxides, Etching, Silicon, Oxygen, Photomasks, Plasma etching, Fluorine, Semiconducting wafers, Plasma, Oxidation

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Scattering, Particles, Silicon, Diodes, Terahertz radiation, Transistors, Antennas, Solid state electronics, Millimeter wave sensors, Nanowires

Proceedings Article | 15 March 2019 Paper
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Oxides, Etching, Argon, Polymers, Silicon, Oxygen, Semiconducting wafers, Polymer thin films, Focus stacking software, Plasma

Showing 5 of 29 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 15 March 2019

SPIE Conference Volume | 26 January 2017

Conference Committee Involvement (3)
The International Conference on Micro- and Nano-Electronics 2018
1 October 2018 | Zvenigorod, Russian Federation
The International Conference on Micro- and Nano-Electronics 2018
1 October 2018 | Zvenigorod, Russian Federation
The International Conference on Micro- and Nano-Electronics 2016
3 October 2016 | Zvenigorod, Russian Federation
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