Dr. Kotaro Obata Profile

Dr. Kotaro Obata

at RIKEN Ctr for Advanced Photonics

SPIE Involvement:

Author

Publications (28)

Proceedings Article | 13 March 2024 Presentation

Formation and characterization of 2D-LIPSS on Ti surfaces with GHz burst mode femtosecond laser pulses

Shota Kawabata, Felix Sima, Shi Bai, Kazunari Ozasa, Kotaro Obata, Godai Miyaji, Koji Sugioka

Proceedings Volume PC12873, PC1287306 (2024) https://doi.org/10.1117/12.3000114

KEYWORDS: Femtosecond phenomena, Titanium, Femtosecond pulse shaping, Silicon, Laser irradiation, Stem cells, Sampling rates, Polarization, Picosecond phenomena, Laser processing

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Proceedings Article | 13 March 2024 Presentation

Glass biochips with tailored volume shapes fabricated by ultrafast laser processing for cancer research

Felix Sima, Kotaro Obata, Mirai Hanzawa, Hiroyuki Kawano, Florin Jipa, Emanuel Axente, Koji Sugioka

Proceedings Volume PC12872, PC1287207 (2024) https://doi.org/10.1117/12.2692848

KEYWORDS: Cancer, Tumor growth modeling, Glasses, Ultrafast lasers, Laser processing, Miniaturization, X-rays, Wet etching, System integration, Radiotherapy

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Proceedings Article | 13 March 2024 Presentation

Ultrahigh speed laser fabrication of numerous glass micro-chambers for molecular analysis

Jiawei Zhang, Kotaro Obata, Kazunari Ozasa, Takanori Uzawa, Yoshihiro Ito, Koji Sugioka

Proceedings Volume PC12873, PC1287304 (2024) https://doi.org/10.1117/12.2692758

KEYWORDS: Ultrafast phenomena, Nucleic acids, Glasses, Rapid manufacturing, Silicon, Polymers, Molecules, Molecular biology, Biological samples, Wet etching

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Proceedings Article | 13 March 2024 Presentation

Fabrication of 3D CYTOP biochip using two-photon polymerized mold towards super-resolution bioimaging

Mirai Hanzawa, Kotaro Obata, Felix Sima, Hiroyuki Kawano, Kazunari Ozasa, Yasutaka Hanada, Godai Miyaji, Atsushi Miyawaki, Koji Sugioka

Proceedings Volume PC12872, PC128720D (2024) https://doi.org/10.1117/12.3001200

KEYWORDS: Fabrication, Super resolution, Polymers, Two photon polymerization, Refractive index, Water, Ultraviolet radiation, Transparency, Resistance, Prostate cancer

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Proceedings Article | 13 March 2024 Presentation

3D microfluidic biochips made of amorphas fluoropolymer CYTOP using two-photon polymerized molding towards super-resolution bioimaging

Kotaro Obata, Mirai Hanzawa, Felix Sima, Hiroyuki Kawano, Kozunari Ozasa, Yasutaka Hanada, Godai Miyaji, Atsushi Miyawaki, Koji Sugioka

Proceedings Volume PC12837, PC1283702 (2024) https://doi.org/10.1117/12.3002296

KEYWORDS: Super resolution, Polymers, Microfluidics, 3D microstructuring, Two photon polymerization, Fabrication, Water, Femtosecond phenomena, Transparency, Refractive index

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Proceedings Article | 17 March 2023 Presentation

GHz burst mode processing: ablation, LIPSS, TPP, LIPAA

Koji Sugioka, Kotaro Obata, Shota Kawabata

Proceedings Volume 12409, 124090P (2023) https://doi.org/10.1117/12.2648534

KEYWORDS: Laser ablation, Femtosecond phenomena, Silicon, Picosecond phenomena, Nanostructuring, Nanolithography, Microfabrication, Materials processing, Laser induced damage, Laser damage threshold

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Proceedings Article | 17 March 2023 Presentation

Novel surface nanostructuring by femtosecond laser with GHz burst mode

Shota Kawabata, Shi Bai, Kotaro Obata, Godai Miyaji, Koji Sugioka

Proceedings Volume PC12408, PC124080D (2023) https://doi.org/10.1117/12.2649440

KEYWORDS: Femtosecond phenomena, Nanostructuring, Polarization, Silicon, Semiconductor lasers, Ultrafast phenomena, Titanium, Picosecond phenomena, Materials processing, Laser processing

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Proceedings Article | 1 April 2022 Presentation

Multi-photon polymerization by GHz burst mode femtosecond laser pulses for improvement of process resolution

Kotaro Obata, Francesc Caballero Lucas, Koji Sugioka

Proceedings Volume PC11988, PC1198803 (2022) https://doi.org/10.1117/12.2610529

KEYWORDS: Femtosecond phenomena, Polymerization, Laser ablation, Multiphoton processes, Polymers, Printing, Picosecond phenomena, Microfabrication, Laser damage threshold, Energy efficiency

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Proceedings Article | 1 April 2022 Presentation

Plasmonic superstructure array fabricated by laser near-field reduction for SERS analysis

Shi Bai, Kotaro Obata, Koji Sugioka

Proceedings Volume PC11989, PC1198907 (2022) https://doi.org/10.1117/12.2607923

KEYWORDS: Plasmonics, Superlattices, Near field, Metals, Nanolithography, Nanostructures, Silica, Optical spheres, Near field scanning optical microscopy, Silicon

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Proceedings Article | 7 March 2022 Presentation

Label-free trace detection of bio-molecules by liquid interface assisted surface-enhanced Raman scattering using microfluidic chip

Shi Bai, Xueli Ren, Kotaro Obata, Yoshihiro Ito, Koji Sugioka

Proceedings Volume PC11955, PC1195503 (2022) https://doi.org/10.1117/12.2609497

KEYWORDS: Liquids, Interfaces, Raman scattering, Microfluidics, Statistical analysis, Tumors, Molecules, Biotechnology, Alzheimer's disease

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Proceedings Article | 5 March 2021 Presentation

Ultrashort pulse GHz burst mode laser ablation at different wavelengths for surface microfabrication

Francesc Caballero-Lucas, Kotaro Obata, Koji Sugioka

Proceedings Volume 11673, 116730B (2021) https://doi.org/10.1117/12.2577985

KEYWORDS: Laser ablation, Ultrafast phenomena, Microfabrication, Thermal effects, Silicon, Semiconductor lasers, Pulsed laser operation, Ultrafast lasers, Near infrared, Laser sources

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Proceedings Article | 5 March 2021 Presentation

Additive and subtractive manufacturing process by hybrid laser material processing

Kotaro Obata, Shi Bai, Koji Sugioka

Proceedings Volume 11696, 116960I (2021) https://doi.org/10.1117/12.2579336

KEYWORDS: Laser processing, Additive manufacturing, Ultraviolet radiation, Polymers, Surface enhanced Raman spectroscopy, Printing, Fabrication, Aerosols, Transparency, Sensors

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Proceedings Article | 2 March 2020 Presentation + Paper

3D glass nanofluidics fabricated by femtosecond laser processing for study of cancer cell metastasis and invasion

F. Sima, H. Kawano, A. Miyawaki, K. Obata, D. Serien, K. Sugioka

Proceedings Volume 11267, 1126714 (2020) https://doi.org/10.1117/12.2547222

KEYWORDS: Glasses, Cancer, Polymers, Microfluidics, Femtosecond phenomena, In vitro testing, Nanolithography, Visualization, Photoresist developing, Laser processing

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Proceedings Article | 23 May 2011 Paper

Depth sensitive Fourier-Scatterometry for the characterization of sub-100 nm periodic structures

V. Ferreras Paz, S. Peterhänsel, Ka. Frenner, W. Osten, A. Ovsianikov, K. Obata, B. Chichkov

Proceedings Volume 8083, 80830M (2011) https://doi.org/10.1117/12.889439

KEYWORDS: Critical dimension metrology, Silicon, Mirrors, Diffraction, Metrology, Two photon polymerization, Photoresist materials, Microscopes, Scatterometry, Photosensitive materials

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Proceedings Article | 18 February 2010 Paper

Individually controlled multi-focus laser processing for two-photon polymerization

Kotaro Obata, Jürgen Koch, Boris Chichkov

Proceedings Volume 7584, 75840L (2010) https://doi.org/10.1117/12.842117

KEYWORDS: Two photon polymerization, Computer generated holography, Spatial light modulators, Laser processing, Phase modulation, Polymers, Diffractive optical elements, Switching, Scanning electron microscopy, Parallel processing

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Proceedings Article | 8 October 2004 Paper

Micromachining of transparent materials by laser-induced plasma-assisted ablation (LIPAA)

Yasutaka Hanada, Koji Sugioka, Kotaro Obata, H. Takase, Hiroshi Takai, I. Miyamoto, Katsumi Midorikawa

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596541

KEYWORDS: Laser ablation, Glasses, Copper, Plasma, Micromachining, Metals, Sapphire, Gold, Laser development, Plating

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Proceedings Article | 17 October 2003 Paper

Dynamics study of multiwavelength excitation process using F2 and KrF excimer lasers

Kotaro Obata, Koji Sugioka, Takahiro Inamura, Hiroshi Takai, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479542

KEYWORDS: Laser ablation, Excimer lasers, Silicon, Ions, Silica, Laser irradiation, Absorption, Laser processing, Signal processing, Mass spectrometry

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Proceedings Article | 2 September 2003 Paper

Advanced laser processing of glass materials

Koji Sugioka, Kotaro Obata, Ya Cheng, Katsumi Midorikawa

Proceedings Volume 5121, (2003) https://doi.org/10.1117/12.515607

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Proceedings Article | 19 February 2003 Paper

High-speed and efficient control of refractive index change of fused silica by multiwavelength excitation process using F2 and KrF excimer lasers

Kotaro Obata, Koji Sugioka, Tatsuya Kono, Hiroshi Takai, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.497735

KEYWORDS: Excimer lasers, Silica, Photons, Diffraction, Refractive index, Laser irradiation, Electrons, Pulsed laser operation, Laser processing, Absorption

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Proceedings Article | 13 September 2002 Paper

Microprocessing of glass by hybrid laser processing

Koji Sugioka, Kotaro Obata, Katsumi Midorikawa, Ming Hui Hong, Ding Wu, L. L. Wong, Yongfeng Lu, Tow Chong Chong

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482090

KEYWORDS: Laser ablation, Excimer lasers, Glasses, Laser processing, Silica, Ultraviolet radiation, Plasma, Absorption, Vacuum ultraviolet, Microfabrication

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Proceedings Article | 18 June 2002 Paper

High-efficiency refractive index modification of fused silica by F2 and KrF excimer laser multiwavelength excitation process

Kotaro Obata, Koji Sugioka, Toshimitsu Akane, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4637, (2002) https://doi.org/10.1117/12.491056

KEYWORDS: Excimer lasers, Photons, Silica, Diffraction, Refractive index, Laser processing, Laser irradiation, Pulsed laser operation, Electrons, Laser ablation

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Proceedings Article | 30 April 2002 Paper

VUV-UV multiwavelength excitation process using F2 and KrF excimer lasers

Koji Sugioka, Toshimitsu Akake, Kotaro Obata, Katsumi Midorikawa

Proceedings Volume 4644, (2002) https://doi.org/10.1117/12.464123

KEYWORDS: Excimer lasers, Laser ablation, Silica, Absorption, Vacuum ultraviolet, Ultraviolet radiation, Laser irradiation, Gallium nitride, Laser processing, Microfabrication

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Proceedings Article | 25 February 2002 Paper

Characterization of fused silica ablation by F2-KrF excimer laser multiwavelength excitation process

Kotaro Obata, Koji Sugioka, Toshimitsu Akane, Naoko Aoki, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456895

KEYWORDS: Excimer lasers, Laser ablation, Silica, Absorption, Refractive index, Diffraction, Laser irradiation, Electrons, Laser processing, Microfabrication

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Proceedings Article | 25 February 2002 Paper

GaN micromachining by short wavelength pulsed laser irradiation

Toshimitsu Akane, Koji Sugioka, Kotaro Obata, Naoko Aoki, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456899

KEYWORDS: Excimer lasers, Etching, Gallium nitride, Pulsed laser operation, Laser ablation, Laser irradiation, Scanning electron microscopy, Reactive ion etching, Micromachining, Crystals

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Proceedings Article | 29 June 2001 Paper

Multiwavelength excitation process of fused-silica by combination of F2 and KrF excimer lasers

Kotaro Obata, Koji Sugioka, Toshimitsu Akane, Naoko Aoki, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432506

KEYWORDS: Excimer lasers, Laser ablation, Silica, Absorption, Vacuum ultraviolet, Laser irradiation, Electrons, Pulsed laser operation, Etching, Laser damage threshold

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Proceedings Article | 29 June 2001 Paper

GaN etching by simultaneous irradiation of KrF excimer laser and F2 laser

Toshimitsu Akane, Koji Sugioka, Kotaro Obata, Shintaro Nomura, Kiyotaka Hammura, Naoko Aoki, Koichi Toyoda, Yoshinobu Aoyagi, Katsumi Midorikawa

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432505

KEYWORDS: Excimer lasers, Etching, Gallium nitride, Laser ablation, Excimers, Scanning electron microscopy, Crystals, Sapphire, Radium, Laser irradiation

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Proceedings Article | 6 November 2000 Paper

F2 laser ablation of GaN

Toshimitsu Akane, Koji Sugioka, Shintaro Nomura, Kiyotaka Hammura, Kotaro Obata, Naoko Aoki, Koichi Toyoda, Yoshinobu Aoyagi, Katsumi Midorikawa

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405691

KEYWORDS: Etching, Excimer lasers, Laser ablation, Gallium nitride, Pulsed laser operation, Laser irradiation, Radium, Semiconductor lasers, Absorption, Reactive ion etching

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Proceedings Article | 7 June 2000 Paper

TiN growth by hybrid radical beam-PLD for Si barrier metal

Kotaro Obata, Koji Sugioka, Koichi Toyoda, Hiroshi Takai, Katsumi Midorikawa

Proceedings Volume 3933, (2000) https://doi.org/10.1117/12.387552

KEYWORDS: Tin, Nitrogen, Silicon, Thin films, Metals, Interfaces, Titanium, Aluminum, Scanning electron microscopy, Crystals

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Showing 5 of 28 publications

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