Dr. Kotaro Obata
at RIKEN Ctr for Advanced Photonics
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI
KEYWORDS: Ultrafast phenomena, Near infrared, Laser sources, Silicon, Semiconductor lasers, Laser ablation, Thermal effects, Ultrafast lasers, Microfabrication, Pulsed laser operation

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV
KEYWORDS: Fabrication, Transparency, Sensors, Aerosols, Polymers, Ultraviolet radiation, Laser processing, Surface enhanced Raman spectroscopy, Additive manufacturing, Printing

Proceedings Article | 2 March 2020 Presentation + Paper
Proc. SPIE. 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
KEYWORDS: Microfluidics, Femtosecond phenomena, Cancer, Visualization, Polymers, Glasses, Laser processing, Photoresist developing, Nanolithography, In vitro testing

Proceedings Article | 23 May 2011 Paper
Proc. SPIE. 8083, Modeling Aspects in Optical Metrology III
KEYWORDS: Microscopes, Diffraction, Mirrors, Metrology, Two photon polymerization, Silicon, Photoresist materials, Scatterometry, Critical dimension metrology, Photosensitive materials

Proceedings Article | 18 February 2010 Paper
Proc. SPIE. 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
KEYWORDS: Switching, Two photon polymerization, Diffractive optical elements, Phase modulation, Polymers, Laser processing, Parallel processing, Scanning electron microscopy, Computer generated holography, Spatial light modulators

Showing 5 of 18 publications
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