Mr. Kousuke Nakajima Profile

Kousuke Nakajima

Executive Officer at OHARA INC.

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Author

Publications (7)

Proceedings Article | 6 July 2006 Paper

Ultra low thermal expansion material for telescope mirror substrate

Kousuke Nakajima, Nobuo Kawasaki, Toshihide Nakajima, Yoshiyuki Owari, Hiroyuki Minamikawa

Proceedings Volume 6273, 62732M (2006) https://doi.org/10.1117/12.670896

KEYWORDS: Surface finishing, Mirrors, Telescopes, Polishing, Birefringence, Refractive index, Ion beams, Precision measurement, Glasses, Thirty Meter Telescope

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Proceedings Article | 18 August 2005 Paper

Material and application study for low thermal expansion glass-ceramic CLEARCERAM series

Kousuke Nakajima, Toshihide Nakajima, Nobuo Kawasaki, Yoshiyuki Owari

Proceedings Volume 5868, 58680T (2005) https://doi.org/10.1117/12.616070

KEYWORDS: Refractive index, Large telescopes, Mirrors, Extreme ultraviolet lithography, Birefringence, Glasses, Surface finishing, Photovoltaics, Polishing, Interferometry

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Proceedings Article | 6 May 2005 Paper

Low thermal expansion substrate material for EUVL components application

Kousuke Nakajima, Toshihide Nakajima, Yoshiyuki Owari

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598392

KEYWORDS: Surface finishing, Extreme ultraviolet lithography, Glasses, Ion beam finishing, Mirrors, Refractive index, Diffusion, Polishing, Surface roughness, Photomasks

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Proceedings Article | 6 December 2004 Paper

Updates on the coefficient of thermal expansion property and surface finish capability of CLEARCERAM-Z series for EUVL photomask substrate application

Kousuke Nakajima, Toshihide Nakajima

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569009

KEYWORDS: Surface finishing, Polishing, Extreme ultraviolet lithography, Surface roughness, Photomasks, Glasses, Temperature metrology, Refractive index, Lithography, Crystals

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Proceedings Article | 24 September 2004 Paper

Low-thermal expansion material for telescope mirror substrate application

Kousuke Nakajima, Nobuo Kawasaki, Toshihide Nakajima

Proceedings Volume 5494, (2004) https://doi.org/10.1117/12.549959

KEYWORDS: Telescopes, Mirrors, Glasses, Temperature metrology, Birefringence, Polishing, Surface finishing, Ultrasonics, Atomic force microscopy, Refractive index

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Proceedings Article | 20 August 2004 Paper

Low-thermal expansion material for EUVL photomask substrate application

Kousuke Nakajima, Nobuo Kawasaki, Toshihide Nakajima

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557815

KEYWORDS: Extreme ultraviolet lithography, Surface finishing, Photomasks, Polishing, Atomic force microscopy, Photovoltaics, Interferometry, Glasses, Refractive index, Surface roughness

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Proceedings Article | 17 December 2003 Paper

Low-thermal-expansion material for EUV applications

Kousuke Nakajima

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518542

KEYWORDS: Surface finishing, Polishing, Extreme ultraviolet lithography, Surface roughness, Photomasks, Atomic force microscopy, Photovoltaics, Glasses, Extreme ultraviolet, Standards development

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Showing 5 of 7 publications

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