Mr. Kouta Nishino Profile

Kouta Nishino

at JSR Engineering Co Ltd

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Author

Publications (3)

Proceedings Article | 1 April 2016 Paper

Strategies to enable directed self-assembly contact hole shrink for tight pitches

Kristin Schmidt, Hitoshi Osaki, Kota Nishino, Martha Sanchez, Chi-Chun Liu, Tsuyoshi Furukawa, Cheng Chi, Jed Pitera, Nelson Felix, Daniel Sanders

Proceedings Volume 9777, 97771U (2016) https://doi.org/10.1117/12.2219213

KEYWORDS: Surface properties, Integrated circuits, Semiconductors, Monte Carlo methods, Directed self assembly, Picosecond phenomena, Polymethylmethacrylate, Chemistry, Atomic force microscopy, Scattering, Lithography

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Proceedings Article | 8 April 2011 Paper

Development of EUV resist for 22nm half pitch and beyond

Kouta Nishino, Ken Maruyama, Tooru Kimura, Toshiyuki Kai, Kentaro Goto, Shalini Sharma

Proceedings Volume 7969, 79692I (2011) https://doi.org/10.1117/12.879430

KEYWORDS: Diffusion, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Line width roughness, Yield improvement, Glasses, Optical lithography, Polymers, Quantum efficiency

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Proceedings Article | 20 March 2010 Paper

Development of EUV resist for 22nm half pitch and beyond

Ken Maruyama, Makoto Shimizu, Yuuki Hirai, Kouta Nishino, Tooru Kimura, Toshiyuki Kai, Kentaro Goto, Shalini Sharma

Proceedings Volume 7636, 76360T (2010) https://doi.org/10.1117/12.846332

KEYWORDS: Diffusion, Line width roughness, Extreme ultraviolet, Extreme ultraviolet lithography, Glasses, Lithography, Amplifiers, Photoresist processing, Optical amplifiers, Magnesium

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