Krishnaparvathy Puthankovilakam
Doctoral Student at Ecole Polytechnique Federale de Lausanne
Publications (6)

Proceedings Article | 27 February 2017 Paper
Proc. SPIE. 10120, Complex Light and Optical Forces XI
KEYWORDS: Diffraction, Modulation, Polarization, Interferometry, Electromagnetic radiation, Computer simulations, Near field, Distance measurement, Near field diffraction, Objectives, Singular optics, Electromagnetism, Nanofabrication, Radio propagation, Diffraction gratings

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Diffraction, Phase shifting, Visualization, Microscopy, Image resolution, Phase shift keying, Printing, Optical proximity correction, Phase measurement, Binary data

Proceedings Article | 4 March 2016 Paper
Proc. SPIE. 9764, Complex Light and Optical Forces X
KEYWORDS: Lithography, Diffraction, Modulation, Phase shift keying, Printing, Photomasks, Phase measurement, Geometrical optics, Neodymium, Stray light

SPIE Journal Paper | 29 January 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Phase shifts, Photomasks, Printing, Phase measurement, Microscopy, Diffraction, Quartz, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Diffraction, Phase shifting, Quartz, Microscopy, Printing, Photomasks, Optical proximity correction, Phase measurement, Tolerancing, Phase shifts

Showing 5 of 6 publications
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